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Products

metal
heaters

overview

Metal Heaters are excellent for applications that require precise temperature control as the material properties of Al allow quick and uniform heating.

operating temperature

Al < 450℃

characteristics

thermal conductivity

high

temperature uniformity

good

Temperature Control Precision

EXCELLENT

application

Chemical Vapor Deposition(CVD)
Atomic Layer Deposition (ALD)
Ashing

types & sizes

Block Heaters

sizes

150mm

200mm

Pedestal Heaters

sizes

150mm

200mm

300mm

Coating Technology

Enhancement of Corrosion Resistance and Durability through Surface Treatments

AlFx

Rapid Thermal Processing (RTP)
Lamphousing

overview

RTP is a process that heats silicon wafers to over 1,000°C in just a few seconds. Infrared rays generated by halogen(or tungsten-halogen) lamps are instantly transmitted to the wafer through a condenser lens. After heat treatment, the wafer is slowly cooled to prevent thermal shock.

operating temperature

rtp < 1,000℃

characteristics

Concentrated Heating
Efficient Heat Treatment
Better Environmental Control
Reduced Lead Time

application

Annealing
Dopant Activation

types & sizes

· AMAT Vantage Plus
· AMAT Centura

materials

stainless steel & copper brazed

lamp #

409

sizes

300mm

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