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Products

ceramic
heaters

overview

Ceramic Heaters are used in various applications that require extreme temperatures as the material AlN possesses excellent thermal resistance and thermal conductivity.

operating temperature

AlN < 700℃

characteristics

thermal conductivity

170W/m-k

temperature uniformity

good

plasma resistance & anti-corrosion

EXCELLENT

durability

good

thermal expansion

Similar to that of Silicon

application

chemical vapor deposition (CVD)
atomic layer deposition (ALD)
diffusion
annealing

types & sizes

Single Zone Heating and Dual Zone Heating technologies are used to increase the control range of our Ceramic Heaters’ Operating Temperatures.

Single Zone

Dual Zone

sizes

200mm

300mm

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