Products
ceramic
heaters
overview
CERAMIC HEATERS are used in various applications that require extreme temperatures as the material AlN possesses excellent thermal resistance and thermal conductivity.
operating temperature
AlN < 700℃
characteristics
thermal conductivity
170W/m-k
temperature uniformity
good
plasma resistance & anti-corrosion
EXCELLENT
durability
good
thermal expansion
Similar to that of Silicon
application
chemical vapor deposition (CVD)
atomic layer deposition (ALD)
diffusion
annealing
types & sizes
Single Zone Heating and Dual Zone Heating technologies are used to increase the control range of our Operating Temperatures.
Single Zone
Dual Zone
sizes
200mm
300mm