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Products

HBM
stage
heaters

overview

HBM Stage Heaters are heating modules that perform bonding within the Thermal Compression Bonding(TCB) equipment. They hold and heat the wafer through a vacuum and a heater. A Polyimide heater made of Black AlN is used for thermal operations.

operating temperature

Ceramic Body < 150℃

characteristics

thermal expansion

Similar to that of Silicon

Quartz is inserted between the heater and the Invar to prevent thermal transfer to the equipment

Consists of AI₂O₃ plates capable of vacuum adsorption

application

HBM (High Bandwidth Memory)

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