Products
metal
heaters
overview
METAL HEATERS are excellent for applications that require precise temperature control as the material properties of Al allow quick and uniform heating.
operating temperature
Al < 450℃
characteristics
thermal conductivity
high
temperature uniformity
good
Temperature Control Precision
EXCELLENT
application
Chemical Vapor Deposition(CVD)
Atomic Layer Deposition (ALD)
Ashing
types & sizes
Block Heaters
sizes
150mm
200mm
Pedestal Heaters
sizes
150mm
200mm
300mm
Coating Technology
Enhancement of Corrosion Resistance and Durability through Surface Treatments
AlFx
Rapid Thermal Processing (RTP)
Lamphousing
overview
RTP is a process that heats silicon wafers to over 1,000°C in just a few seconds. Infrared rays generated by halogen(or tungsten-halogen) lamps are instantly transmitted to the wafer through a condenser lens. After heat treatment, the wafer is slowly cooled to prevent thermal shock.
operating temperature
rtp < 1,000℃
characteristics
Concentrated Heating
Efficient Heat Treatment
Better Environmental Control
Reduced Lead Time
application
Annealing
Dopant Activation
types & sizes
· AMAT Vantage Plus
· AMAT Centura
materials
stainless steel & copper brazed
lamp #
409
sizes
300mm