BOBOO HITECH

contact

Products

HBM
stage
heaters

overview

HBM STAGE HEATERS are heating modules that perform bonding within the Thermo-Compression Bonding(TCB) equipment. They hold and heat the wafer through a vacuum and a heater.

operating temperature

AlN < 150℃

characteristics

Temperature Uniformity

±1%

Flatness

< 2μm

application

Advanced Packaging

Thermo-Compression Bonding(TCB)

Flip-Chip

High Bandwidth Memory(HBM)

Scroll to Top