陶瓷加热器

Products

大纲

陶瓷加热器由于AlN材料的特性，具有优异的耐热性和热导性，适用于高温的薄膜处理等。

工作温度

AlN < 700℃

特征

thermal conductivity

170W/m-k

temperature uniformity

good

plasma resistance & anti-corrosion

EXCELLENT

durability

good

thermal expansion

Similar to that of Silicon

应用领域

chemical vapor deposition (CVD)
atomic layer deposition (ALD)
diffusion
annealing

类型和尺寸

BOBOO HITECH 不仅拥有Single Zone Heating，还具备Dual Zone Heating, 以扩大陶瓷加热器的操作温度控制范围。

Single Zone

Dual Zone

尺寸

200mm

300mm

Products

ceramic
heaters

overview

CERAMIC HEATERS are used in various applications that require extreme temperatures as the material AlN possesses excellent thermal resistance and thermal conductivity.

operating temperature

AlN < 700℃

characteristics

thermal conductivity

170W/m-k

temperature uniformity

good

plasma resistance & anti-corrosion

EXCELLENT

durability

good

thermal expansion

Similar to that of Silicon

application

chemical vapor deposition (CVD)
atomic layer deposition (ALD)
diffusion
annealing

types & sizes

Single Zone Heating and Dual Zone Heating technologies are used to increase the control range of our Operating Temperatures.

Single Zone

Dual Zone

sizes

200mm

300mm

Products

ceramic
heaters

overview

CERAMIC HEATER는 AlN 소재의 특성상 내열성, 열전도성이 우수하여 고온의 막질 처리 등에 사용됩니다.

operating temperature

AlN < 700℃

characteristics

thermal conductivity

170W/m-k

temperature uniformity

good

plasma resistance & anti-corrosion

EXCELLENT

durability

good

thermal expansion

Similar to that of Silicon

application

chemical vapor deposition (CVD)
atomic layer deposition (ALD)
diffusion
annealing

Products