BOBOO HITECH

Products

加热套

大纲

紧贴气体管道外观传递热量,通过间接加热管道内流动的气体,防止其凝固或物性变化。由加热器、温度传感器和控制系统组成。

工作温度

Silicon-Rubber < 230℃

Teflon < 260℃

特征

temperature control precision

EXCELLENT

temperature uniformity

good

应用领域

Chemical Vapor Deposition (CVD)
Atomic Layer Deposition (ALD)
Oxidization
Annealing
Etching

类型和尺寸

BOBOO HITECH 制造Silicon-Rubber和Teflon材料的加热套。

silicon-rubber

Sizes

Min. 20mm×50mm, ø6.35 | Max. 400mm×3000mm, ø500

capacity tolerance

±10%

insulation resistance

1,000MΩ Over/DC500V

withstanding voltage

1,500V/min

teflon

Sizes

Thickness 5 ~ 25t | Diameter ø25.4 ~ ø325

capacity tolerance

±10%

insulation resistance

1,000MΩ Over/DC500V

withstanding voltage

1,500V/min

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