BOBOO HITECH

Products

ceramic
heaters

overview

CERAMIC HEATERS are used in various applications that require extreme temperatures as the material AlN possesses excellent thermal resistance and thermal conductivity.

operating temperature

AlN < 700℃

characteristics

thermal conductivity

170W/m-k

temperature uniformity

good

plasma resistance & anti-corrosion

EXCELLENT

durability

good

thermal expansion

Similar to that of Silicon

application

chemical vapor deposition (CVD)
atomic layer deposition (ALD)
diffusion
annealing

types & sizes

Single Zone Heating and Dual Zone Heating technologies are used to increase the control range of our Operating Temperatures.

Single Zone

Dual Zone

sizes

200mm

300mm

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