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Electrostatic Chuck

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Electrostatic
Chucks (ESC)

大纲

ESC 是利用静电力固定晶圆，并通过内置加热器电路控制晶圆的工艺温度和热均匀性的核心部件。
BOBOO HITECH 具备将ESC的电极板和加热器进行粘接和分离的技术能力，并可根据客户的具体需求进行清洗、维修和制造。

工作温度

AlN < 400℃

Al₂O₃ < 100℃

应用领域

Etching
Chemical Vapor Deposition(CVD)
Physical Vapor Deposition(PVD)
Ion Implantation

类型和尺寸

BOBOO HITECH通过各种设计制造ESC。

chucking type

coulomb

在ESC介电层之间产生Chucking Force

工艺温度变化也不影响Chucking Force

Johnsen-Rahbek

在ESC和晶圆之间的微空间中产生Chucking Force

即使施加低电压也能产生高Chucking Force

electrode / pole type

monopolar

使用一个电极将晶圆固定在卡盘表面

bipolar

使用一个电极将晶圆固定在卡盘表面

Multipolar

使用三个不同的电极以更强的电力固定晶圆

ceramic sintering process

multi-layer ceramic (tape casting)

内部安装Multi-layer Electrodes和Multi-zone Heaters

hot press

Dielectric Strength : HIGH
Durability : GOOD
Plasma Resistance & Anti-Corrosion : EXCELLENT

multi-zone heaters

normal-zone

1
heating zone

multi-zone

4 ~ 300+
heating zones

coating technology

通过多种表面处理实现耐腐蚀性、耐久性等

diamond-like carbon(DLC)
tiN
siC

尺寸

200mm

300mm

Products

Electrostatic
Chucks (ESC)

overview

ESC is a key component that uses electrostatic force to secure the wafer and built-in heat circuits to control its processing temperature and temperature uniformity. BOBOO HITECH provides cleaning, repairing, and manufacturing services of ESCs with technology to bond and de-bond the electrode plate and heater.

operating temperature

AlN < 400℃

Al₂O₃ < 100℃

application

Etching
Chemical Vapor Deposition(CVD)
Physical Vapor Deposition(PVD)
Ion Implantation

types & sizes

BOBOO HITECH offers numerous design options for ESCs.

chucking type

coulomb

Chucking Force occurs between ESC and dielectric layer

Chucking Force remains independent from temperature variations

Johnsen-Rahbek

Chucking Force occurs in the Microspace between ESC and wafer

Chucking Force remains high even in low voltage operations

electrode / pole type

monopolar

Single electrode to clamp wafer

bipolar

Contrasting electrodes to clamp wafer with strong electrical attraction

Multipolar

Three different electrodes to clamp wafer with even stronger electrical attraction

ceramic sintering process

multi-layer ceramic (tape casting)

Multi-layer Electrodes & Multi-zone Heaters installed internally

hot press

Dielectric Strength : HIGH
Durability : GOOD
Plasma Resistance & Anti-Corrosion : EXCELLENT

multi-zone heaters

normal-zone

1
heating zones

multi-zone

4 ~ 300+
heating zones

sizes

200mm

300mm

Products

Electrostatic
Chucks (ESC)

overview

ESC는 정전기력(Electrostatic Force)을 이용하여 웨이퍼를 고정하고 내장 히터 회로로 웨이퍼의 공정 온도와 열 균일성을 제어하는 핵심 부품입니다. ㈜보부하이테크는 ESC의 Electrode Plate와 히터를 Bonding, De-bonding 할 수 있는 기술력을 갖추었으며, 고객의 세부적 Needs에 따라 세정, 수리 및 제작이 가능합니다.

operating temperature

AlN < 400℃

Al₂O₃ < 100℃

application

Etching
Chemical Vapor Deposition(CVD)
Physical Vapor Deposition(PVD)
Ion Implantation

types & sizes

㈜보부하이테크는 다양한 설계 디자인으로 ESC를 제조하고 있습니다.

chucking type

coulomb

ESC 유전층 사이에서 Chucking Force 발생

공정 온도 변화에도 Chucking Force는 무관

Johnsen-Rahbek

ESC와 웨이퍼 사이의 Microspace에서 Chucking Force 발생

저전압 인가 시에도 높은 Chucking Force 발생

electrode / pole type

monopolar

하나의 전극을 사용해 웨이퍼를 척 표면에 고정

bipolar

두 개의 서로 다른 전극을 사용해 웨이퍼를 강력한 전기적 인력으로 고정

Multipolar

세 개의 서로 다른 전극을 사용해 웨이퍼를 더 강한 전기적 인력으로 고정

ceramic sintering process

multi-layer ceramic (tape casting)

Multi-Layer Electrodes & Multi-Zone Heaters 내부 장착

hot press

Dielectric Strength : HIGH
Durability : GOOD
Plasma Resistance & Anti-Corrosion : EXCELLENT

multi-zone heaters

normal-zone

1
heating zone

multi-zone

4 ~ 300+
heating zones

sizes

200mm

300mm