Etching
Chemical Vapor Deposition(CVD)
Physical Vapor Deposition(PVD)
Ion Implantation
类型和尺寸
BOBOO HITECH通过各种设计制造ESC。
chucking type
coulomb
在ESC介电层之间产生Chucking Force
工艺温度变化也不影响Chucking Force
Johnsen-Rahbek
在ESC和晶圆之间的微空间中产生Chucking Force
即使施加低电压也能产生高Chucking Force
electrode / pole type
monopolar
使用一个电极将晶圆固定在卡盘表面
bipolar
使用一个电极将晶圆固定在卡盘表面
Multipolar
使用三个不同的电极以更强的电力固定晶圆
ceramic sintering process
multi-layer ceramic
(tape casting)
内部安装Multi-layer Electrodes和Multi-zone Heaters
hot press
Dielectric Strength : HIGH
Durability : GOOD
Plasma Resistance & Anti-Corrosion : EXCELLENT
multi-zone heaters
normal-zone
1
heating zone
multi-zone
4 ~ 300+
heating zones
coating technology
通过多种表面处理实现耐腐蚀性、耐久性等
diamond-like carbon(DLC)
tiN
siC
尺寸
200mm
300mm
Products
Electrostatic
Chucks (ESC)
overview
ESC is a key component that uses electrostatic force to secure the wafer and built-in heat circuits to control its processing temperature and temperature uniformity.
BOBOO HITECH provides cleaning, repairing, and manufacturing services of ESCs with technology to bond and de-bond the electrode plate and heater.
operating temperature
AlN < 400℃
Al₂O₃ < 100℃
application
Etching
Chemical Vapor Deposition(CVD)
Physical Vapor Deposition(PVD)
Ion Implantation
types & sizes
BOBOO HITECH offers numerous design options for ESCs.
chucking type
coulomb
Chucking Force occurs between ESC and dielectric layer
Chucking Force remains independent from temperature variations
Johnsen-Rahbek
Chucking Force occurs in the Microspace between ESC and wafer
Chucking Force remains high even in low voltage operations
electrode / pole type
monopolar
Single electrode to clamp wafer
bipolar
Contrasting electrodes to clamp wafer with strong electrical attraction
Multipolar
Three different electrodes to clamp wafer with even stronger electrical attraction
Dielectric Strength : HIGH
Durability : GOOD
Plasma Resistance & Anti-Corrosion : EXCELLENT
multi-zone heaters
normal-zone
1
heating zones
multi-zone
4 ~ 300+
heating zones
sizes
200mm
300mm
Products
Electrostatic
Chucks (ESC)
overview
ESC는 정전기력(Electrostatic Force)을 이용하여 웨이퍼를 고정하고 내장 히터 회로로 웨이퍼의 공정 온도와 열 균일성을 제어하는 핵심 부품입니다. ㈜보부하이테크는 ESC의 Electrode Plate와 히터를 Bonding, De-bonding 할 수 있는 기술력을 갖추었으며, 고객의 세부적 Needs에 따라 세정, 수리 및 제작이 가능합니다.
operating temperature
AlN < 400℃
Al₂O₃ < 100℃
application
Etching
Chemical Vapor Deposition(CVD)
Physical Vapor Deposition(PVD)
Ion Implantation
types & sizes
㈜보부하이테크는 다양한 설계 디자인으로 ESC를 제조하고 있습니다.
chucking type
coulomb
ESC 유전층 사이에서 Chucking Force 발생
공정 온도 변화에도 Chucking Force는 무관
Johnsen-Rahbek
ESC와 웨이퍼 사이의 Microspace에서 Chucking Force 발생
저전압 인가 시에도 높은 Chucking Force 발생
electrode / pole type
monopolar
하나의 전극을 사용해 웨이퍼를 척 표면에 고정
bipolar
두 개의 서로 다른 전극을 사용해 웨이퍼를 강력한 전기적 인력으로 고정
Multipolar
세 개의 서로 다른 전극을 사용해 웨이퍼를
더 강한 전기적 인력으로 고정
ceramic sintering process
multi-layer ceramic
(tape casting)
Multi-Layer Electrodes & Multi-Zone Heaters 내부 장착
hot press
Dielectric Strength : HIGH
Durability : GOOD
Plasma Resistance & Anti-Corrosion : EXCELLENT