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ESC(정전척)BUSINESS

ESC(Electro Static Chuck) Repair

LAM #374 / #608 / #611 ESC 300mm

P/N	TYPE	PROCESS
839-019090-374 839-019090-608A 839-019090-611B	Al2O3	Etch

LAM #315 / #324 / #328 / #385 / #412 / #432 / #438 ESC 300mm

P/N	TYPE	PROCESS
839-800327-315 839-019090-324 839-019090-328 839-800327-385 389-800327-412 389-800327-432 839-800327-438	Al2O3 Johnsen - Rahbek	Etch

AMAT Producer / E-Max / Enabler ESC 300mm

P/N	TYPE	PROCESS
0010-24774 0010-16392 0010-27784	AlN Johnsen - Rahbek	Etch

LAM #508 ESC 200mm

P/N	TYPE	PROCESS
839-440562-508	Al2O3 Johnsen - Rahbek	Etch

ESC Repair Procedure